Reading Tips On September 28th, the "10th Five-Year Plan" and "100-Nanlon Ion Implanter" major projects for integrated circuit manufacturing equipment of the National "Tenth Five-year Plan" 863 Plan undertaken by Beijing North Microelectronics Corporation and Beijing Zhongkexin Co. The project successfully passed the acceptance by the Ministry of Science and Technology, which marked a historic breakthrough in China's core manufacturing of integrated circuit manufacturing equipment.
In three years, there is no advanced integrated circuit manufacturing equipment that spans five technological generations, and it is impossible to have independent advanced integrated circuit chip products. At the end of the Ninth Five-Year Plan period, the level of China's IC equipment was 6 inches and 500 nanometers, a difference of five generations from the leading 8-inch 100-nanometer at that time, and all domestic 8-inch and above production lines did not have a domestically produced device. At the same time, IC manufacturing equipment companies have occupied the market for a long time, imposed a technology blockade and embargo containment strategy on China, and used high prices to control the Chinese market. To escape from the predicament of being beaten and beaten, only self-strengthening. To this end, Beijing, with the support of the Ministry of Science and Technology, vigorously developed the IC equipment industry. In November 2002, the Beijing Municipal Government launched the "100-nm high-density plasma etching machine and high-angle ion implanter" project.
"Ion etcher and ion implanter are the key equipments on the chip production line. The so-called 100 nm refers to the small groove width engraved on the silicon material. The smaller this value, the higher the accuracy and integration of the chip. 8 inches refers to the size of the silicon wafer, the larger the silicon wafer, the higher the efficiency, but the higher the technical requirements. Compared to the "ninth five-year" end of the 6-inch 500 nm spans five technology generation." Northern Microelectronics related The person in charge told the reporter. It took more than 10 years for foreign technology to develop from 500 nm to 100 nm, but it took only 3 years in China.
“As a core technology for equipment manufacturing and information industry, domestic ion etching machines and ion implanters have achieved breakthroughs, which has greatly enhanced the technical strength and independent innovation capability of China’s integrated circuit manufacturing equipment with independent intellectual property rights, and achieved integrated circuits. The leap-forward development of the equipment manufacturing industry, said the person in charge of China Kexin Co., Ltd. in an interview with the China Intellectual Property News reporter. At the same time, she also said that the development of manufacturing equipment plays a leading role in the technology of each generation of integrated circuit technology. Domestic equipment enables chip manufacturers to reduce their production costs while at the same time raising the technological level of manufacturing chips. Consumers can buy cheaper and more advanced electronic products. What's more important is that China's high-end integrated circuit core equipment has achieved zero breakthroughs and it has broken the foreign embargo containment strategy for China's IC manufacturing equipment.
The course of escorting intellectual property all the way for 3 years has gone through more than 10 years in developed countries. It is undoubtedly an arduous journey full of stories. “One of the important difficulties is how to avoid patent traps that foreign companies have carefully designed, how to use patent protection, and to fight a patent war.†The person in charge of the intellectual property work of China Kexin Company told reporters. “After we are preparing for independent research and development, foreign competitors have stepped up their patent deployment in China, which has brought greater challenges to our work,†said the person in charge of Northern Microelectronics.
In this regard, China Science and Technology Corporation has formulated a patent strategy: First, we must independently research and development, first apply for a patent; Second, we must respect the intellectual property rights of others; Third, dare to respond to rights. The person in charge of China Kexin Co., Ltd. detailed this process to reporters: “The first procedure of the project is to conduct a comprehensive patent literature search. We have searched for 430 patents for ion implanters. After performing the itemized analysis, we completed The patent circumvents countermeasure research, and establishes a patent infringement emergency team with relevant units. At the same time, it consults intellectual property advisors and legal advisors, and applies for patent protection of their own intellectual property rights, and also effectively avoids the intellectual property rights of others."
The North Microelectronics Corporation has also become a specialized intellectual property department, actively preparing for the establishment of a patent information database for enterprises, and through the patent database information system of the enterprise, it has successfully implemented patent abstract information retrieval functions and statistical analysis functions, and has conducted various research directions. Statistical analysis of data. It is understood that the North Microelectronics Corporation is one of the hundred patent pilot enterprises in Beijing in 2005.
In addition, after the challenges faced by R&D companies, they also gradually realized that enterprises must gain initiative on the issue of intellectual property rights. The fundamental way out is to improve the capabilities and level of invention and creation, and strive for more and more fields, especially for integrated circuit equipment. In the high-tech field, it has its own place. The reporter learned from the search that, as of the acceptance of the project, Zhongkexin applied for 137 patents, including 26 invention patents, 111 utility model patents, and 7 software copyrights; Northern Microelectronics applied for 135 patents.
The road to innovation continues. Even though technological breakthroughs have achieved a dazzling aura, the reporter found in the interview that the project developers still faced all these achievements with a common sense. “Industrialization of high-end integrated circuit core equipment is a brand new start, but the road behind it is still very long.†The responsible person from the North said cautiously: “The improvement of equipment, the improvement of performance, and the development of key components are all necessary for us to continue our efforts. And, at present, international technology has reached a level of 65 nanometers, which is also our next step."
At the same time, China Kexin also stated that the company will soon develop a 12-inch, 100-nanometer, high-angle ion implanter, and is also developing a 65-nanometer high-beam ion implanter to ensure that new products can be introduced continuously to meet product upgrades by chip manufacturers. Replace the necessary equipment.
In three years, there is no advanced integrated circuit manufacturing equipment that spans five technological generations, and it is impossible to have independent advanced integrated circuit chip products. At the end of the Ninth Five-Year Plan period, the level of China's IC equipment was 6 inches and 500 nanometers, a difference of five generations from the leading 8-inch 100-nanometer at that time, and all domestic 8-inch and above production lines did not have a domestically produced device. At the same time, IC manufacturing equipment companies have occupied the market for a long time, imposed a technology blockade and embargo containment strategy on China, and used high prices to control the Chinese market. To escape from the predicament of being beaten and beaten, only self-strengthening. To this end, Beijing, with the support of the Ministry of Science and Technology, vigorously developed the IC equipment industry. In November 2002, the Beijing Municipal Government launched the "100-nm high-density plasma etching machine and high-angle ion implanter" project.
"Ion etcher and ion implanter are the key equipments on the chip production line. The so-called 100 nm refers to the small groove width engraved on the silicon material. The smaller this value, the higher the accuracy and integration of the chip. 8 inches refers to the size of the silicon wafer, the larger the silicon wafer, the higher the efficiency, but the higher the technical requirements. Compared to the "ninth five-year" end of the 6-inch 500 nm spans five technology generation." Northern Microelectronics related The person in charge told the reporter. It took more than 10 years for foreign technology to develop from 500 nm to 100 nm, but it took only 3 years in China.
“As a core technology for equipment manufacturing and information industry, domestic ion etching machines and ion implanters have achieved breakthroughs, which has greatly enhanced the technical strength and independent innovation capability of China’s integrated circuit manufacturing equipment with independent intellectual property rights, and achieved integrated circuits. The leap-forward development of the equipment manufacturing industry, said the person in charge of China Kexin Co., Ltd. in an interview with the China Intellectual Property News reporter. At the same time, she also said that the development of manufacturing equipment plays a leading role in the technology of each generation of integrated circuit technology. Domestic equipment enables chip manufacturers to reduce their production costs while at the same time raising the technological level of manufacturing chips. Consumers can buy cheaper and more advanced electronic products. What's more important is that China's high-end integrated circuit core equipment has achieved zero breakthroughs and it has broken the foreign embargo containment strategy for China's IC manufacturing equipment.
The course of escorting intellectual property all the way for 3 years has gone through more than 10 years in developed countries. It is undoubtedly an arduous journey full of stories. “One of the important difficulties is how to avoid patent traps that foreign companies have carefully designed, how to use patent protection, and to fight a patent war.†The person in charge of the intellectual property work of China Kexin Company told reporters. “After we are preparing for independent research and development, foreign competitors have stepped up their patent deployment in China, which has brought greater challenges to our work,†said the person in charge of Northern Microelectronics.
In this regard, China Science and Technology Corporation has formulated a patent strategy: First, we must independently research and development, first apply for a patent; Second, we must respect the intellectual property rights of others; Third, dare to respond to rights. The person in charge of China Kexin Co., Ltd. detailed this process to reporters: “The first procedure of the project is to conduct a comprehensive patent literature search. We have searched for 430 patents for ion implanters. After performing the itemized analysis, we completed The patent circumvents countermeasure research, and establishes a patent infringement emergency team with relevant units. At the same time, it consults intellectual property advisors and legal advisors, and applies for patent protection of their own intellectual property rights, and also effectively avoids the intellectual property rights of others."
The North Microelectronics Corporation has also become a specialized intellectual property department, actively preparing for the establishment of a patent information database for enterprises, and through the patent database information system of the enterprise, it has successfully implemented patent abstract information retrieval functions and statistical analysis functions, and has conducted various research directions. Statistical analysis of data. It is understood that the North Microelectronics Corporation is one of the hundred patent pilot enterprises in Beijing in 2005.
In addition, after the challenges faced by R&D companies, they also gradually realized that enterprises must gain initiative on the issue of intellectual property rights. The fundamental way out is to improve the capabilities and level of invention and creation, and strive for more and more fields, especially for integrated circuit equipment. In the high-tech field, it has its own place. The reporter learned from the search that, as of the acceptance of the project, Zhongkexin applied for 137 patents, including 26 invention patents, 111 utility model patents, and 7 software copyrights; Northern Microelectronics applied for 135 patents.
The road to innovation continues. Even though technological breakthroughs have achieved a dazzling aura, the reporter found in the interview that the project developers still faced all these achievements with a common sense. “Industrialization of high-end integrated circuit core equipment is a brand new start, but the road behind it is still very long.†The responsible person from the North said cautiously: “The improvement of equipment, the improvement of performance, and the development of key components are all necessary for us to continue our efforts. And, at present, international technology has reached a level of 65 nanometers, which is also our next step."
At the same time, China Kexin also stated that the company will soon develop a 12-inch, 100-nanometer, high-angle ion implanter, and is also developing a 65-nanometer high-beam ion implanter to ensure that new products can be introduced continuously to meet product upgrades by chip manufacturers. Replace the necessary equipment.
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